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| title | chunk | source | category | tags | date_saved | instance |
|---|---|---|---|---|---|---|
| HARMST | 1/1 | https://en.wikipedia.org/wiki/HARMST | reference | science, encyclopedia | 2026-05-05T11:49:10.224642+00:00 | kb-cron |
HARMST is an acronym for high aspect ratio microstructure technology, which describes fabrication technologies, used to create high-aspect-ratio microstructures with heights between tens of micrometers up to a centimeter, and aspect ratios greater than 10:1. Examples include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching.
== See also == LIGA Micromechanical systems — high aspect ratio (HAR) micromachining
== References ==