---
title: "HARMST"
chunk: 1/1
source: "https://en.wikipedia.org/wiki/HARMST"
category: "reference"
tags: "science, encyclopedia"
date_saved: "2026-05-05T11:49:10.224642+00:00"
instance: "kb-cron"
---

HARMST is an acronym for high aspect ratio microstructure technology, which describes fabrication technologies,
used to create high-aspect-ratio microstructures with heights between tens of micrometers up to a centimeter, and aspect ratios greater than 10:1.  Examples include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching.


== See also ==
LIGA
Micromechanical systems — high aspect ratio (HAR) micromachining


== References ==