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---
title: "Electron backscatter diffraction"
chunk: 7/7
source: "https://en.wikipedia.org/wiki/Electron_backscatter_diffraction"
category: "reference"
tags: "science, encyclopedia"
date_saved: "2026-05-05T10:04:21.164305+00:00"
instance: "kb-cron"
---
=== Integrated EBSD/EDS mapping ===
When simultaneous EDS/EBSD collection can be achieved, the capabilities of both techniques can be enhanced. There are applications where sample chemistry or phase cannot be differentiated via EDS alone because of similar composition, and structure cannot be solved with EBSD alone because of ambiguous structure solutions. To accomplish integrated mapping, the analysis area is scanned, and at each point, Hough peaks and EDS region-of-interest counts are stored. Positions of phases are determined in X-ray maps, and each element's measured EDS intensities are given in charts. The chemical intensity ranges are set for each phase to select the grains. All patterns are then re-indexed off-line. The recorded chemistry determines which phase/crystal-structure file is used to index each point. Each pattern is indexed by only one phase, and maps displaying distinguished phases are generated. The interaction volumes for EDS and EBSD are significantly different (on the order of micrometres compared to tens of nanometres), and the shape of these volumes using a highly tilted sample may have implications on algorithms for phase discrimination.
EBSD, when used together with other in-SEM techniques such as cathodoluminescence (CL), wavelength dispersive X-ray spectroscopy (WDS) and/or EDS can provide a deeper insight into the specimen's properties and enhance phase identification. For example, the minerals calcite (limestone) and aragonite (shell) have the same chemical composition calcium carbonate (CaCO3) therefore EDS/WDS cannot tell them apart, but they have different microcrystalline structures so EBSD can differentiate between them.
=== Integrated EBSD/DIC mapping ===
EBSD and digital image correlation (DIC) can be used together to analyse the microstructure and deformation behaviour of materials. DIC is a method that uses digital image processing techniques to measure deformation and strain fields in materials. By combining EBSD and DIC, researchers can obtain both crystallographic and mechanical information about a material simultaneously. This allows for a more comprehensive understanding of the relationship between microstructure and mechanical behaviour, which is particularly useful in fields such as materials science and engineering.
DIC can identify regions of strain localisation in a material, while EBSD can provide information about the microstructure in these regions. By combining these techniques, researchers can gain insights into the mechanisms responsible for the observed strain localisation. For example, EBSD can be used to determine the grain orientations and boundary misorientations before and after deformation. In contrast, DIC can be used to measure the strain fields in the material during deformation. Or EBSD can be used to identify the activation of different slip systems during deformation, while DIC can be used to measure the associated strain fields. By correlating these data, researchers can better understand the role of different deformation mechanisms in the material's mechanical behaviour.
Overall, the combination of EBSD and DIC provides a powerful tool for investigating materials' microstructure and deformation behaviour. This approach can be applied to a wide range of materials and deformation conditions and has the potential to yield insights into the fundamental mechanisms underlying mechanical behaviour.
=== 3D EBSD ===
3D EBSD combines EBSD with serial sectioning methods to create a three-dimensional map of a material's crystallographic structure. The technique involves serially sectioning a sample into thin slices, and then using EBSD to map the crystallographic orientation of each slice. The resulting orientation maps are then combined to generate a 3D map of the crystallographic structure of the material. The serial sectioning can be performed using a variety of methods, including mechanical polishing, focused ion beam (FIB) milling, or ultramicrotomy. The choice of sectioning method depends on the size and shape of the sample, on its chemical composition, reactivity and mechanical properties, as well as the desired resolution and accuracy of the 3D map.
3D EBSD has several advantages over traditional 2D EBSD. First, it provides a complete picture of a material's crystallographic structure, allowing for a more accurate and detailed analysis of the microstructure. Second, it can be used to study complex microstructures, such as those found in composite materials or multi-phase alloys. Third, it can be used to study the evolution of microstructure over time, such as during deformation or heat treatment.
However, 3D EBSD also has some limitations. It requires extensive data acquisition and processing, proper alignment between slices, and can be time-consuming and computationally intensive. In addition, the quality of the 3D map depends on the quality of the individual EBSD maps, which can be affected by factors such as sample preparation, data acquisition parameters, and analysis methods. Overall, 3D EBSD is a powerful technique for studying the crystallographic structure of materials in three dimensions, and is widely used in materials science and engineering research and development.
== Notes ==
== References ==
== Further reading ==
"Electron Backscatter Diffraction (EBSD)". DoITPoMS.
Britton, T. Ben; Jiang, Jun; Guo, Y.; Vilalta-Clemente, A.; Wallis, D.; Hansen, L.N.; Winkelmann, A.; Wilkinson, A.J. (July 2016). "Tutorial: Crystal orientations and EBSD — Or which way is up?". Materials Characterization. 117: 113126. doi:10.1016/j.matchar.2016.04.008. hdl:10044/1/31250. S2CID 138070296.
Charpagne, Marie-Agathe; Strub, Florian; Pollock, Tresa M. (April 2019). "Accurate reconstruction of EBSD datasets by a multimodal data approach using an evolutionary algorithm". Materials Characterization. 150: 184198. arXiv:1903.02988. doi:10.1016/j.matchar.2019.01.033. S2CID 71144677.
Jackson, M. A.; Pascal, E.; De Graef, M. (2019). "Dictionary Indexing of Electron Back-Scatter Diffraction Patterns: a Hands-On Tutorial". Integrating Materials and Manufacturing Innovation. 8 (2): 226246. doi:10.1007/s40192-019-00137-4. S2CID 182073071.
Randle, Valerie (September 2009). "Electron backscatter diffraction: Strategies for reliable data acquisition and processing". Materials Characterization. 60 (90): 913922. doi:10.1016/j.matchar.2009.05.011.
Schwartz, Adam J.; Kumar, Mukul; Adams, Brent L.; Field, David P., eds. (2009). Electron Backscatter Diffraction in Materials Science (2nd ed.). New York, New York: Springer New York, New York (published 12 August 2009). doi:10.1007/978-0-387-88136-2. ISBN 978-0-387-88135-5.
Zaefferer, S.; Raabe, D.; A., Khorashadizadeh. "Tomographic orientation microscopy (3D EBSD) on steels using a joint FIB SEM technique". Max Planck Institute for Iron Research.
== External links ==
=== Codes ===
De Graef, M. (July 2017). "EMsoft (simulate EBSP)". GitHub.
Anes, Hakon (2020). "kikuchipy (process, simulate, analyze EBSD patterns with python)". kikuchipy.
Hielscher, Schaeben (2008). "MTEX (EBSD analysis)". MTEX.
Ruggles, T. J.; Bomarito, G. F.; Qiu, R. L.; Hochhalter, J. D. (1 December 2018). "OpenXY (HR-EBSD)". GitHub.
Tong, Vivian; Britton, Ben (July 2017). "TrueEBSD: correcting spatial distortions in electron backscatter diffraction maps". Ultramicroscopy. 221 113130. arXiv:1909.00347. doi:10.1016/j.ultramic.2020.113130. PMID 33290982. S2CID 202538027.
=== Videos ===
Britton, Ben (11 January 2021). Introduction to EBSD: Section 1 - What can EBSD tell you?. YouTube.
Nowell, Matt (22 February 2022). Learn How I Prepare Samples for EBSD Analysis. EDAX (YouTube).
Wright, Stuart (31 January 2022). EBSD Analysis of Deformed Microstructures. EDAX (YouTube).
Electron Backscatter Diffraction Explained: QUANTAX EBSD. Bruker Nano Analytics (YouTube). 1 September 2020.