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| title | chunk | source | category | tags | date_saved | instance |
|---|---|---|---|---|---|---|
| Interferometry | 8/10 | https://en.wikipedia.org/wiki/Interferometry | reference | science, encyclopedia | 2026-05-05T09:43:15.174742+00:00 | kb-cron |
In coherence scanning interferometry, interference is only achieved when the path length delays of the interferometer are matched within the coherence time of the light source. CSI monitors the fringe contrast rather than the phase of the fringes. Fig. 17 illustrates a CSI microscope using a Mirau interferometer in the objective; other forms of interferometer used with white light include the Michelson interferometer (for low magnification objectives, where the reference mirror in a Mirau objective would interrupt too much of the aperture) and the Linnik interferometer (for high magnification objectives with limited working distance). The sample (or alternatively, the objective) is moved vertically over the full height range of the sample, and the position of maximum fringe contrast is found for each pixel. The chief benefit of coherence scanning interferometry is that systems can be designed that do not suffer from the 2 pi ambiguity of coherent interferometry, and as seen in Fig. 18, which scans a 180μm x 140μm x 10μm volume, it is well suited to profiling steps and rough surfaces. The axial resolution of the system is determined in part by the coherence length of the light source. Industrial applications include in-process surface metrology, roughness measurement, 3D surface metrology in hard-to-reach spaces and in hostile environments, profilometry of surfaces with high aspect ratio features (grooves, channels, holes), and film thickness measurement (semi-conductor and optical industries, etc.). Fig. 19 illustrates a Twyman–Green interferometer set up for white light scanning of a macroscopic object. Holographic interferometry is a technique which uses holography to monitor small deformations in single wavelength implementations. In multi-wavelength implementations, it is used to perform dimensional metrology of large parts and assemblies and to detect larger surface defects. Holographic interferometry was discovered by accident as a result of mistakes committed during the making of holograms. Early lasers were relatively weak and photographic plates were insensitive, necessitating long exposures during which vibrations or minute shifts might occur in the optical system. The resultant holograms, which showed the holographic subject covered with fringes, were considered ruined. Eventually, several independent groups of experimenters in the mid-60s realized that the fringes encoded important information about dimensional changes occurring in the subject, and began intentionally producing holographic double exposures. The main Holographic interferometry article covers the disputes over priority of discovery that occurred during the issuance of the patent for this method. Double- and multi- exposure holography is one of three methods used to create holographic interferograms. A first exposure records the object in an unstressed state. Subsequent exposures on the same photographic plate are made while the object is subjected to some stress. The composite image depicts the difference between the stressed and unstressed states. Real-time holography is a second method of creating holographic interferograms. A holograph of the unstressed object is created. This holograph is illuminated with a reference beam to generate a hologram image of the object directly superimposed over the original object itself while the object is being subjected to some stress. The object waves from this hologram image will interfere with new waves coming from the object. This technique allows real time monitoring of shape changes. The third method, time-average holography, involves creating a holograph while the object is subjected to a periodic stress or vibration. This yields a visual image of the vibration pattern.